XRDmap Pro Wafer Edition

自動化晶圓定向檢測系統

Inline wafer orientation mapping truly fab compliant

在線式晶圓取向圖譜分析，符合晶圓廠標準      

Optimize wafer alignment inline for higher productivity

在線優化晶圓對準，大幅提升產能

Materials

材料

The XRDmap Pro Wafer Edition enables maximum value add by tuning subsequent processes such as epitaxy, lithography and implanting to the crystal orientation. This enables supplier process compliance and a smooth material flow by its ultra-fast measurement speed and seamless factory automation.

XRDmap Pro 晶圓版可實現價值—— 通過使外延、光刻、離子注入等后續工藝與晶體取向精確適配，憑借超高速的測量速度與無縫的工廠自動化集成能力，既能確保供應商工藝合規，又能實現物料流轉順暢高效。

Features & Benefits

重要特性與重要價值:   

Applications 應用

Precise Surface Orientation Mapping with Omega-Scan

Even within a single crystal, slight variations in crystal orientation can occur across the surface, often due to internal strains from lattice defects. Similarly, well-grown thin films can display unique in-plane orientation distributions.

即便是同一塊單晶，其表面不同區域也可能存在晶體取向的細微偏差，這類偏差通常源于晶格缺陷引發的內應力。同理，生長狀態良好的薄膜也會呈現出獨特的面內取向分布。

Mapping such surfaces typically requires numerous measurements, and this is where the Omega-Scan method excels with its speed and efficiency. The image below illustrates an orientation map measured on a (Si, Ge) solid solution wafer, where the maximum orientation difference is just 0.03°. The concentric circles in the map correspond to the crystal’s growth rings, providing valuable insights into its structure.

對這類晶體表面進行取向測繪通常需要開展大量測量工作，而這正是Omega 掃描法的優勢所在 —— 憑借其優異的檢測速度與效率脫穎而出。

下方圖像展示的是一塊硅鍺固溶體晶圓的取向分布圖，該晶圓大的取向偏差只為 0.03°。圖中的同心圓與晶體的生長環一一對應，為分析其晶體結構提供了重要依據。

Advantages of the Omega-Scan Method

Omega-Scan 方法重要優勢 （Freiberg Instruments 重要技術）：

---Stable and Simplified Setup

The X-ray tube and detector remain fixed, requiring only a single measuring circle and no monochromator.

穩定便捷的安裝調試

X 射線管與探測器固定不動，只需單次測量周期，且無需單色儀。

---Comprehensive Data Collection

All necessary data for full orientation determination is captured in just one rotation.

全方面數據采集

單次旋轉即可采集全定向測定所需全部數據。

--High Precision with Minimal Measurement Time

The method delivers exceptional accuracy within a short measurement duration.

高精度?測量耗時短

短時間內即可實現優異精度。

These features make the Omega-Scan method particularly well-suited for routine measurements and industrial applications, where speed and reliability are essential.

憑借這些特性，Omega-Scan 方法尤為適配常規測量與工業應用場景 —— 這類場景對速度與可靠性有著重要要求。

Understanding the Omega-Scan Method

解讀 Omega-Scan 方法

The Omega-Scan technique involves rotating the specimen 360° around a specific axis, such as the surface normal. The X-ray source and detector are positioned based on the crystal type to ensure an optimal number of reflections per turn. By analyzing the angular positions of these reflections, the crystal lattice orientation is determined in relation to the rotation axis.

Omega-Scan 技術的工作原理為：將試樣繞某一特定軸（如表面法線）完成 360° 旋轉，X 射線源與探測器則根據晶體類型進行定位，以確保每圈旋轉均可獲得優異的反射次數。通過分析這些反射信號的角度位置，即可確定晶格取向相對于旋轉軸的具體方位。

To precisely align the lattice orientation with the crystal surface, a laser beam checks the surface direction. Other relevant reference planes or directions can also be measured using optical tools. This technique enables accurate orientation measurement of single crystals in any configuration, achieving a reproducibility within a few arc seconds—often in just a few seconds of measurement.

為精確校準晶格取向與晶體表面的對位關系，激光束會對晶體表面方向進行檢測。其余相關參考平面或方向，亦可通過光學工具完成測量。

該技術可實現對任意形態單晶的高精度取向測量，重復性精度控制在數角秒范圍內 —— 且單次測量耗時通常只需數秒。

A specialized application of the Omega-Scan method is precision lattice-parameter determination, particularly for cubic crystals, providing highly accurate structural insights.

Omega-Scan 方法的一項專業應用方向為高精度晶格參數測定，該應用尤其適用于立方晶體，可提供高精度的晶體結構解析能力。

User-Friendly and Advanced Operating Software

人性化操作軟件

多種操作模式

操作員模式：采用固定測量參數設計，保障操作流程安全高效。

管理員模式：支持測量配方的創建與修改，可針對新型材料調整參數。

直觀引導式操作界面

確保不同經驗水平的用戶，均可享受到流暢高效的操作流程。

預設配方與自定義配方雙模式

既可從豐富的現成配方中直接選用，也可根據特定需求創建專屬配方。

測量結果與修正值自動顯示

可即時查看測量結果，同步自動生成修正值，助力晶格取向精確調校。

圖譜分析功能

搭載圖譜分析功能，賦能高精度測量分析工作。

數據導入導出功能

自動化晶圓定向檢測系統可輕松完成數據導入導出，便于數據共享及與其他系統的集成對接。